Beam and Plasma Ion Beam Source L-400

Ion Beam Source L400

Gas discharge ion source for generating linear ion beams. Working principle - anode layer ion beam source. The high uniformity of ion flux distribution along the ion source makes it the best choice for processing substrates on drums or turntables.
process:
- sputtering materials from dielectric and conductive targets;
- Magnetron sputtering assist;
- Ion cleaning, etching;
- polishing;
- Plasma Enhanced Chemical Vapor Deposition (PECVD);
- Surface modification.

Vacuum Technology Laboratory

Vacuum Technology Laboratories (Trademark: Beams & Plasmas™) is an advanced, fast-growing company from Silicon Valley, Russia. LVT is a manufacturer of vacuum coating equipment. High reliability and high performance, reasonable and affordable are our advantages.

LVT enables:
- 3 NIKA devices (NIKA-2012, -2013, -2014)
- Process equipment range: magnetrons, ion beam sources, plasma generators, sensors and accessories
LVT provides:
- Engineering and Consulting
- Maintenance and repair of vacuum equipment
- Modernization of existing equipment.